Effects of Sacrifice Oxidation on Characterization of...

Effects of Sacrifice Oxidation on Characterization of Defects in High-Purity Semi-Insulating 4H-SiC by Discharge Current Transient Spectroscopy

Nishikawa, Seiji, Okada, Ryota, Matsuura, Hideharu
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Volume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.271
Date:
May, 2012
File:
PDF, 346 KB
english, 2012
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