Ellipsometry Characterization of Hydrogenated Amorphous...

Applied Physics Express 2010 / 11 Vol. 3; Iss. 11

Ellipsometry Characterization of Hydrogenated Amorphous Silicon Layers Formed on Textured Crystalline Silicon Substrates

Watanabe, Kouji, Matsuki, Nobuyuki, Fujiwara, Hiroyuki
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Volume:
3
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/apex.3.116604
Date:
November, 2010
File:
PDF, 1.12 MB
english, 2010
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