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Ar Ion-Beam Etching of Gadolinium-Gallium Garnet
Katoh, Yujiro, Sugimoto, Naoto, Tate, Akiyuki, Shibukawa, AtsushiVolume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.141
Date:
January, 1992
File:
PDF, 345 KB
1992