Ti/Pt/Ti/Cu-Metallized Interconnects for GaN...

Applied Physics Express 2012 / 5 Vol. 5; Iss. 6

Ti/Pt/Ti/Cu-Metallized Interconnects for GaN High-Electron-Mobility Transistors on Si Substrate

Lin, Yueh-Chin, Kuo, Tza-Yao, Chuang, Yu-Lin, Wu, Chien-Hua, Chang, Chia-Hua, Huang, Kuan-Ning, Chang, Edward Yi
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Volume:
5
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.5.066503
Date:
May, 2012
File:
PDF, 1.23 MB
english, 2012
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