Selective silicon-on-insulator (SOI) implant: a new...

Journal of Micromechanics and Microengineering 2005 / 09 Vol. 15; Iss. 9

Selective silicon-on-insulator (SOI) implant: a new micromachining method without footing and residual stress

Park, Sangjun, Kwak, Donghun, Ko, Hyoungho, Song, Taeyong, Cho, Dong-il
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/9/001
Date:
September, 2005
File:
PDF, 2.16 MB
english, 2005
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