Changes in optical transmittance and surface morphology of...

Journal of Materials Research 1998 / 10 Vol. 13; Iss. 10

Changes in optical transmittance and surface morphology of AlN thin films exposed to atmosphere

Watanabe, Yoshihisa, Sakuragi, Yoshifumi, Amamoto, Yoshiki, Nakamura, Yoshikazu
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Volume:
13
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1998.0404
Date:
October, 1998
File:
PDF, 232 KB
english, 1998
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