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Electron energy-loss spectroscopy study of a multilayered SiO x and SiO xC y film prepared by plasma-enhanced chemical vapor deposition
Zhang, Zaoli, Wagner, Thomas, Sigle, Wilfried, Schulz, AndreasVolume:
21
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2006.0073
Date:
March, 2006
File:
PDF, 154 KB
english, 2006