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Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing
Namazu, Takahiro, Okamura, Y., Tashiro, Y., Inoue, ShozoVolume:
539-543
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.539-543.3213
File:
PDF, 769 KB
english, 2007