Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature
Senzaki, Junji, Fukuda, Kenji, Imai, Seiji, Tanaka, Yasunori, Kobayashi, Naoto, Tanoue, Hisao, Okushi, Hideyo, Arai, KazuoVolume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.865
File:
PDF, 340 KB
2000