Process-Induced Strained P-MOSFET Featuring Nickel-Platinum...

Process-Induced Strained P-MOSFET Featuring Nickel-Platinum Silicided Source/Drain

Lee, Rinus Tek Po, Liow, Tsung-Yang, Tan, Kian-Ming, Ang, Kah-Wee, Chui, King-Jien, Guo, Qiang-Lo, Samudra, Ganesh, Chi, Dong-Zhi, Yeo, Yee-Chia
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Volume:
913
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0913-D02-04
Date:
January, 2006
File:
PDF, 175 KB
english, 2006
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