Effect of Off-Angle from Si (0001) Surface and Polytype on...

Materials Science Forum 2000 Vol. 338-342

Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures

Fukuda, Kenji, Suzuki, Seiji, Senzaki, Junji, Kosugi, Ryouji, Nagai, Kiyoko, Sekigawa, Toshihiro, Okushi, Hideyo, Yoshida, Sadafumi, Tanaka, Tomoyuki, Arai, Kazuo
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Volume:
338-342
Year:
2000
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1283
File:
PDF, 333 KB
english, 2000
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