Lateral Solid-Phase Epitaxial Growth of Phosphorus-Ion...

Lateral Solid-Phase Epitaxial Growth of Phosphorus-Ion Implanted CVD Polysilicon

Warabisako, Terunori
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Volume:
134
Year:
1987
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2100562
File:
PDF, 517 KB
english, 1987
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