Microstructure evolution in amorphous Ge/Si multilayers...

Journal of Materials Research 1997 / 7 Vol. 12; Iss. 7

Microstructure evolution in amorphous Ge/Si multilayers grown by magnetron sputter deposition

Järrendahl, K., Ivanov, I., Sundgren, J-E., Radnóczi, G., Czigany, Zs., Greene, J. E.
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Volume:
12
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1997.0249
Date:
July, 1997
File:
PDF, 826 KB
english, 1997
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