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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Evaluation of Nb(Si)N as Metal Gate Material
Van Hoornick, Nausikaa, De Witte, Hilde, Witters, Thomas, Zhao, Chao, Conard, Thierry, Huatori, Hannu, Swerts, Johan, Schram, Tom, Maes, Jan Willem, De Gendt, Stefan, Heyns, MarcVolume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209299
File:
PDF, 428 KB
english, 2006