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A 3-DOF Friction-Free Planar Motor Using Piezoelectric Elements
Torii, Akihiro, Nishio, Mitsuhiro, Itatsu, Yuki, Doki, Kae, Ueda, AkiteruVolume:
523-524
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.523-524.739
Date:
November, 2012
File:
PDF, 1.05 MB
english, 2012