[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Morphology of the Surface of the Polycrystalline and Single-Crystal SiC Treated with pure NF3 Plasma and Analysis of Chemical Reaction of SiC with NF3
Takatsugu, Kanatani, Tetsuro, Tojo, Masamichi, Tanaka, Minoru, Inaba, Akimasa, TasakaVolume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2789273
File:
PDF, 568 KB
english, 2007