A Simple Method for Measurement of Photoacid Generator...

Electrochemical and Solid-State Letters 2007 Vol. 10; Iss. 9

A Simple Method for Measurement of Photoacid Generator Photoreaction Kinetics in Formulated, Chemically Amplified Photoresist Films

Lee, Cheng-Tsung, Yueh, Wang, Roberts, Jeanette, Henderson, Clifford L.
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Volume:
10
Year:
2007
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2751835
File:
PDF, 392 KB
english, 2007
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