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Investigation of a PVT SiC-Growth Set-up Modified by an Additional Gas Flow
Straubinger, Thomas L., Wellmann, Peter J., Winnacker, AlbrechtVolume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.33
File:
PDF, 389 KB
2001