Texture Investigations In Damascene Copper Interconnects
Mirpuri, Kabir Kumar, Szpunar, Jerzy A., Kozaczek, Kris J.Volume:
408-412
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.408-412.1627
File:
PDF, 432 KB
2002