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Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches
Alina Alexeenko, Sruti Chigullapalli, Juan Zeng, Xiaohui Guo, Andrew Kovacs, Dimitrios PeroulisVolume:
96
Year:
2011
Language:
english
Pages:
13
DOI:
10.1016/j.ress.2011.01.002
File:
PDF, 1.86 MB
english, 2011