Neutralization of Ion Beams for Reduction of Charging...

Materials Science Forum 2005 Vol. 494

Neutralization of Ion Beams for Reduction of Charging Damage in Plasma Etching

Nina, Aleksandra, Radmilović-Radjenović, M., Petrović, Z.Lj.
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Volume:
494
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.494.297
File:
PDF, 222 KB
english, 2005
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