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Study of Carbon Films on Silicon Substrates
Jašek, O., Eliáš, M., Frgala, Z., Matějková, Jiřina, Rek, Antonín, Kadlečíková, M.Volume:
482
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.482.203
File:
PDF, 1.45 MB
english, 2005