Study of porous silicon substrates for the monolithic...

International Journal of Microwave and Wireless Technologies 2014 / 02 Vol. 6; Iss. 1

Study of porous silicon substrates for the monolithic integration of radiofrequency circuits

Capelle, Marie, Billoué, Jérome, Poveda, Patrick, Gautier, Gael
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Volume:
6
Language:
english
Journal:
International Journal of Microwave and Wireless Technologies
DOI:
10.1017/S1759078713001050
Date:
February, 2014
File:
PDF, 237 KB
english, 2014
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