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Oxidation Process of SiC by RTP Technique
Kwietniewski, N., Golaszewska, K., Piotrowski, T.T., Rzodkiewicz, W., Gutt, T., Sochacki, M., Szmidt, Jan, Piotrowska, AnnaVolume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.529
File:
PDF, 278 KB
english, 2009