Oxidation Process of SiC by RTP Technique

Kwietniewski, N., Golaszewska, K., Piotrowski, T.T., Rzodkiewicz, W., Gutt, T., Sochacki, M., Szmidt, Jan, Piotrowska, Anna

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Volume:

615-617

Year:

2009

Language:

english

Journal:

Materials Science Forum

DOI:

10.4028/www.scientific.net/MSF.615-617.529

File:

PDF, 278 KB

english, 2009

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