Role of Substrate on the Growth Process of Polycrystalline...

Materials Science Forum 2004 Vol. 455-456

Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition

Pereira, Luís, Águas, Hugo, Raniero, Leandro, Martins, Rui Miguel S., Fortunato, Elvira, Martins, Rodrigo
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Volume:
455-456
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.455-456.112
File:
PDF, 346 KB
english, 2004
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