Tailoring the microstructure and surface morphology of...

Nanotechnology 2008 / 03 Vol. 19; Iss. 12

Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications

Luber, E, Mohammadi, R, Ophus, C, Lee, Z, Nelson-Fitzpatrick, N, Westra, K, Evoy, S, Dahmen, U, Radmilovic, V, Mitlin, D
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Volume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/12/125705
Date:
March, 2008
File:
PDF, 781 KB
english, 2008
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