CON-TACT Planarization Process of Spin-on Dielectrics for Device Fabrication
Shih, Wu-Sheng, Yota, Jiro, Itchhaporia, KetanVolume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2834244
File:
PDF, 912 KB
english, 2008