Formation Mechanisms of Divacancy-Oxygen Complex in Silicon

Formation Mechanisms of Divacancy-Oxygen Complex in Silicon

Furuhashi, Masayuki, Taniguchi, Kenji
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Volume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2825173
File:
PDF, 363 KB
english, 2008
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