Ohmic Contact for C-face n-Type 4H-SiC with Reduced...

Materials Science Forum 2006 Vol. 527-529

Ohmic Contact for C-face n-Type 4H-SiC with Reduced Graphite Precipitation

Maeyama, Yusuke, Nishikawa, Kouichi, Fukuda, Yusuke, Shimizu, Masaaki, Sato, Masashi, Ono, J., Iwakuro, Hiroaki
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.867
File:
PDF, 472 KB
english, 2006
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