Photoelectron Spectroscopy and Optical Properties of Al-Doped ZnO Films Prepared by Sputtering with Radio Frequency Power Applied to Al Target
Tseng, Chun-An, Lin, Jing-Chie, Weng, Wei-Heng, Lin, Chen-ChunVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.025801
Date:
February, 2013
File:
PDF, 1.20 MB
english, 2013