Investigations of N-H and Si-N Bonding Configurations in...

Japanese Journal of Applied Physics 1985 / 11 Vol. 24; Iss. Part 2, No

Investigations of N-H and Si-N Bonding Configurations in Hydrogenated Amorphous Silicon Nitride Films by Infrared Absorption Spectroscopy

Narikawa, Shiro, Kojima, Yoshimi, Ehara, Shaw
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.L861
Date:
November, 1985
File:
PDF, 513 KB
1985
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