Analysis on the Sticking Failure of Micro-Comb Driving Structure
Liu, Hai Peng, Zhang, Zhen Quan, Gao, Shi Qiao, Jin, LeiVolume:
562-565
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.562-565.1122
Date:
July, 2013
File:
PDF, 322 KB
english, 2013