![](/img/cover-not-exists.png)
On Point Defect Gettering by Back-Side Damage in the Si-SiO2 System
Kropman, Daniel, Dolgov, S., Kärner, T.Volume:
143-147
Year:
1997
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.143-147.1027
File:
PDF, 306 KB
1997