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Evaluation of Silicon Sheet Film Growth and Wafer Processing via Structural, Chemical and Electrical Diagnostics
Rozgonyi, George A., Lu, J., Zhang, R., Rand, James, Jonczyk, RalfVolume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.211
File:
PDF, 1.66 MB
english, 2004