Reliability Improvement in Silicon Dioxide

Reliability Improvement in Silicon Dioxide

Minami, Masashi, Kamiura, Yoichi
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Volume:
725
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.725.231
Date:
July, 2012
File:
PDF, 862 KB
english, 2012
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