Analysis of the Main Parameters in the Chemical Mechanical...

Analysis of the Main Parameters in the Chemical Mechanical Polishing Process

Yang, Xiang Dong, Wei, Xin, Xie, Xiao Zhu, Chen, Zhuo, Zou, Wei Bo
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Volume:
317-319
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.317-319.29
Date:
August, 2011
File:
PDF, 271 KB
english, 2011
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