Analysis of the Main Parameters in the Chemical Mechanical Polishing Process
Yang, Xiang Dong, Wei, Xin, Xie, Xiao Zhu, Chen, Zhuo, Zou, Wei BoVolume:
317-319
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.317-319.29
Date:
August, 2011
File:
PDF, 271 KB
english, 2011