Two-Dimensionally Position-Controlled...

Two-Dimensionally Position-Controlled Excimer-Laser-Crystallization of Silicon Thin Films on Glassy Substrate

Ozawa, Motohiro, Oh, Chang-Ho, Matsumura, Masakiyo
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.38.5700
Date:
October, 1999
File:
PDF, 1.71 MB
english, 1999
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