Electrical Characterization of Electron Beam Induced Defects in Epitaxially Grown Si1-xGex
Mamor, M., Auret, F.D., Goodman, S.A., Myburg, G., Deenapanray, Prakash N.K., Meyer, W.E.Volume:
258-263
Year:
1997
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.258-263.115
File:
PDF, 448 KB
1997