Electron Beam Induced Damage in Poly-Si Gate MOS Structures...

Electron Beam Induced Damage in Poly-Si Gate MOS Structures and Its Effect on Long-Term Stability

Shimaya, Masakazu
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Volume:
130
Year:
1983
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2119863
File:
PDF, 745 KB
english, 1983
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