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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Pulse CVD Deposition of Ru Films from Ru(II) [eta-accent]3-Allylic Complex
Trubin, Sergey V., Morozova, Natalia B., Semyannikov, Pyotr P., Bessonov, Alexandr, Gelfond, Nikolay V., Igumenov, Igor K.Year:
2009
Language:
english
DOI:
10.1149/1.3207681
File:
PDF, 428 KB
english, 2009