Simulation and Characterization of a Novel Large Stroke...

Advanced Materials Research 2011 / 11 Vol. 403-408

Simulation and Characterization of a Novel Large Stroke Micromirror

Sun, Quan, Jiang, Zong Fu, Cretu, Edmond
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Volume:
403-408
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.403-408.3411
Date:
November, 2011
File:
PDF, 2.77 MB
english, 2011
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