Step Coverage and Composition of Pb(Zr, Ti)O3 Capacitors...

Step Coverage and Composition of Pb(Zr, Ti)O3 Capacitors Prepared on Sub-Micron Three-Dimensional Trench Structure by Metalorganic Chemical Vapor Deposition

Nagai, Atsushi, Asano, Gouji, Minamidate, Jun, Choi, Chel Jong, Cho, Choong-Rae, Park, Youngsoo, Funakubo, Hiroshi
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Volume:
830
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-830-D2.2
Date:
January, 2004
File:
PDF, 167 KB
english, 2004
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