Step Coverage and Composition of Pb(Zr, Ti)O3 Capacitors Prepared on Sub-Micron Three-Dimensional Trench Structure by Metalorganic Chemical Vapor Deposition
Nagai, Atsushi, Asano, Gouji, Minamidate, Jun, Choi, Chel Jong, Cho, Choong-Rae, Park, Youngsoo, Funakubo, HiroshiVolume:
830
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-830-D2.2
Date:
January, 2004
File:
PDF, 167 KB
english, 2004