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Mechanisms of Damage Formation during Rare Earth Ion Implantation in Nitride Semiconductors
Ruterana, Pierre, Chauvat, Marie-Pierre, Lorenz, KatharinaVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.11NH02
Date:
November, 2013
File:
PDF, 722 KB
english, 2013