Assessment of GaN Surface Pretreatment for Atomic Layer...

Applied Physics Express 2011 / 5 Vol. 4; Iss. 5

Assessment of GaN Surface Pretreatment for Atomic Layer Deposited High- k Dielectrics

Nepal, Neeraj, Garces, Nelson Y., Meyer, David J., Hite, Jennifer K., Mastro, Michael A., Eddy, Jr., Charles R.
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Volume:
4
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/apex.4.055802
Date:
May, 2011
File:
PDF, 1.48 MB
english, 2011
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