Effect of Organosilane Underlayers on the Effectiveness of...

Electrochemical and Solid-State Letters 2009 Vol. 12; Iss. 4

Effect of Organosilane Underlayers on the Effectiveness of NiB Barrier Layers in ULSI Metallization

Yoshino, Masahiro, Aramaki, Hitoshi, Matsuda, Itsuaki, Okinaka, Yutaka, Osaka, Tetsuya
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Volume:
12
Year:
2009
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3072778
File:
PDF, 290 KB
english, 2009
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