Low-Energy-Ion-Assisted Reactive Sputter Deposition of...

Materials Science Forum 2000 Vol. 338-342

Low-Energy-Ion-Assisted Reactive Sputter Deposition of Epitaxial AlN Thin Films on 6H-SiC

Tungasmita, Sukkaneste, Persson, P.O.Å., Järrendahl, K., Hultman, L., Birch, Jens
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Volume:
338-342
Year:
2000
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1519
File:
PDF, 424 KB
english, 2000
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