High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System
Itoh, Hitoshi, Kubota, Yusuke, Kashiwagi, Yusaku, Takeda, Keigo, Ishikawa, Kenji, Kondo, Hiroki, Toyoda, Hirotaka, Hori, MasaruVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.11NE01
Date:
November, 2013
File:
PDF, 580 KB
english, 2013