[ECS 21st Symposium on Microelectronics Technology and Devices - Ouro Preto - MG - Brazil (August 28-September 1, 2006)] ECS Transactions - Study of the Silicon Etch Rate and Mechanisms When Using Aluminium, Tin and Copper Electrodes
Verdonck, Patrick, Ruas, RonaldoVolume:
4
Year:
2007
Language:
english
DOI:
10.1149/1.2813531
File:
PDF, 688 KB
english, 2007