Effects of Helium Implantation on the Mechanical Properties...

Materials Science Forum 2010 / 4 Vol. 645-648

Effects of Helium Implantation on the Mechanical Properties of 4H-SiC

Barbot, Jean François, Beaufort, Marie France, Audurier, Valerie
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.721
Date:
April, 2010
File:
PDF, 1.04 MB
english, 2010
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