Impurity Gettering Investigation in the Si-SiO2 System
Kropman, Daniel, Poll, V., Tambek, L., Kärner, T., Abru, U., Strik, M.Volume:
69-70
Year:
1999
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.69-70.267
File:
PDF, 426 KB
1999